Comment asml SNF 2007-12-09 13:17:56: Stepper Update

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Sun Dec 9 13:17:57 PST 2007


Rechecked IQC after 18 hours stabilization. Focus improved slightly but image tilt( X and Y) and stone to lens tilt (X and Y ) are beyond the update limits of the tool. Stepper is still down. Will notify ASM-l of stepper condition.  GS




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