Problem asml SNF 2007-12-10 10:59:07: Use with caution

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Dec 10 10:59:07 PST 2007


The stepper is powered up and stable. However there is some focus shift and image tilt. We are working with ASM-L to resolve the issues. If your work does not require the tool at optimum condition, you may use the system at your own risk. 




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