Problem asml SNF 2007-12-10 10:59:07: Use with caution

gsosa at gsosa at
Mon Dec 10 10:59:07 PST 2007

The stepper is powered up and stable. However there is some focus shift and image tilt. We are working with ASM-L to resolve the issues. If your work does not require the tool at optimum condition, you may use the system at your own risk. 

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