Comment asml SNF 2007-12-17 16:26:11: Stepper Update 12/17/07

gsosa at gsosa at
Mon Dec 17 16:26:12 PST 2007

Installed new inline HE/O2 regulator at tool. Used helium leakchecker to sniff all new joint connections. All tested OK. System is in lens purge mode to flush contamination. ASM-L Vendor began PM. UV lamp replaced. All critical surfaces cleaned. Stage bearings and rods cleaned and lubed. Work will continue tomorrow(12/18). Stepper Down- Do Not Use. 

More information about the asml-pcs mailing list