From mahnaz at snf.stanford.edu Fri Jul 6 13:44:57 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 6 Jul 2007 13:44:57 -0700 Subject: Problem asml SNF 2007-06-22 13:28:20: chilled water and compressed air Message-ID: I have shot few more wafers I need to do SEM on them. From gsosa at snf.stanford.edu Mon Jul 9 09:12:19 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 9 Jul 2007 09:12:19 -0700 Subject: Shutdown asml SNF 2007-07-09 09:12:18: System needs lamp change. Message-ID: ASML will be here this morning 7/9 to change the lamp. From gsosa at snf.stanford.edu Mon Jul 9 13:26:16 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 9 Jul 2007 13:26:16 -0700 Subject: Shutdown asml SNF 2007-07-09 09:12:18: System needs lamp change. Message-ID: ASM-L field service engineer extended the life of the lamp. They rstated the lamp and checked uniformity/intensity. ASM-L ardered a new lamp and they will replace the lamp as soon as it becomes available. From gsosa at snf.stanford.edu Tue Jul 10 13:54:51 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 10 Jul 2007 13:54:51 -0700 Subject: Shutdown asml SNF 2007-07-10 13:54:51: Lamp Change Message-ID: ASM-L is doing a lamp change. From gsosa at snf.stanford.edu Tue Jul 10 15:38:20 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 10 Jul 2007 15:38:20 -0700 Subject: Shutdown asml SNF 2007-07-10 13:54:51: Lamp Change Message-ID: Vendor replaced and set up UV lamp. From gsosa at snf.stanford.edu Mon Jul 16 16:11:48 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 16 Jul 2007 16:11:48 -0700 Subject: Problem asml SNF 2007-07-16 16:11:48: ASM-L is out of focus Message-ID: The IQC test indicates that focus is at .82 microns. The focus is out of range for the IQC to update. Checked several times througout the day. Also nothing unusual happened over the weekend. I do have a call into ASM-L Field Service. I will also check the IQC first thing in the morning to see if focus improves. From gsosa at snf.stanford.edu Wed Jul 18 17:32:00 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 18 Jul 2007 17:32:00 -0700 Subject: Comment asml SNF 2007-07-18 17:32:00: Focus problem on ASM Stepper Message-ID: Field service is troubleshooting the focus drift problem on the ASM stepper. Adjusting the the lens pressure from 4.1mbar to 4.5 mbar did not bring the focus back into spec. Also, F/S trying to aquire and load into our stepper the 4" diagnostic test jobs. From gsosa at snf.stanford.edu Fri Jul 20 16:38:27 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 20 Jul 2007 16:38:27 -0700 Subject: Problem asml SNF 2007-07-16 16:11:48: ASM-L is out of focus Message-ID: Field service adjusted and monitored the lens gas pressure. The pressure is stable at 4 mBar. The system focus was adjusted and a new reference state defined. System ready to use. From gsosa at snf.stanford.edu Fri Jul 20 16:39:17 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 20 Jul 2007 16:39:17 -0700 Subject: Comment asml SNF 2007-07-18 17:32:00: Focus problem on ASM Stepper Message-ID: Focus problem fixed by field service. Please see prior comments for details. From gsosa at snf.stanford.edu Mon Jul 30 09:21:27 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 30 Jul 2007 09:21:27 -0700 Subject: Comment asml SNF 2007-07-30 09:21:27: IQC Test Message-ID: Unable to run IQC test.System not communicating with IA Driver. Reset system CPU's. Did full start up. Ran IQC test. All OK. Focus at -10 nm GS From binder.mann at asml.com Mon Jul 30 10:42:52 2007 From: binder.mann at asml.com (Binder Mann) Date: Mon, 30 Jul 2007 13:42:52 -0400 Subject: Comment asml SNF 2007-07-30 09:21:27: IQC Test In-Reply-To: <20070730162128.0A8C04C3C4@smtp1.stanford.edu> Message-ID: <0788D5A046D0134DB5F0CEF36E4EBF6133CC0E@USWILX84.sn-us.asml.com> Hi Gary, Did you look at the log what was the error? We can also check as we will be there tomorrow. Thanks and regards, Binder -----Original Message----- From: gsosa at snf.stanford.edu [mailto:gsosa at snf.stanford.edu] Sent: Monday, July 30, 2007 09:21 To: asml-pcs at snf.stanford.edu Subject: Comment asml SNF 2007-07-30 09:21:27: IQC Test Unable to run IQC test.System not communicating with IA Driver. Reset system CPU's. Did full start up. Ran IQC test. All OK. Focus at -10 nm GS -- The information contained in this communication and any attachments is confidential and may be privileged, and is for the sole use of the intended recipient(s). Any unauthorized review, use, disclosure or distribution is prohibited. If you are not the intended recipient, please notify the sender immediately by replying to this message and destroy all copies of this message and any attachments. ASML is neither liable for the proper and complete transmission of the information contained in this communication, nor for any delay in its receipt. From mahnaz at snf.stanford.edu Mon Jul 30 12:14:08 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 30 Jul 2007 12:14:08 -0700 Subject: Problem asml SNF 2007-07-30 12:14:08: rostem is running the system and Message-ID: exposed one wafer but only one field exposed and an error came up, the system is stuck . I have left Gary an voice mail. From gsosa at snf.stanford.edu Mon Jul 30 14:42:06 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 30 Jul 2007 14:42:06 -0700 Subject: Problem asml SNF 2007-07-30 12:14:08: rostem is running the system and Message-ID: Logging screen indicated a leveling problem and wafer was rejected. Unable to exit ftom the batch control screen(hourglass still running for over an hour). Removed reticles from system through material handling. Exited and restarted the system software. Checked IQC- Still good. Had Rostem retry has wafer. Wafer exposed with no problem. GS From binder.mann at asml.com Mon Jul 30 14:53:47 2007 From: binder.mann at asml.com (Binder Mann) Date: Mon, 30 Jul 2007 17:53:47 -0400 Subject: Problem asml SNF 2007-07-30 12:14:08: rostem is running the system and In-Reply-To: <20070730214206.1DF654C57A@smtp1.stanford.edu> Message-ID: <0788D5A046D0134DB5F0CEF36E4EBF6133CC12@USWILX84.sn-us.asml.com> Hi Gary, First time around the wafer failed for focusing and leveling: that means the wafer must have some kind of contamination on the back, which came off some where in the system during unloading and the wafer went thru exposure with no error. Please advise everyone to check wafer backs for c/n prior running thru the system. Thanks and regards, Binder -----Original Message----- From: gsosa at snf.stanford.edu [mailto:gsosa at snf.stanford.edu] Sent: Monday, July 30, 2007 14:42 To: asml-pcs at snf.stanford.edu Subject: Re: Problem asml SNF 2007-07-30 12:14:08: rostem is running the system and Logging screen indicated a leveling problem and wafer was rejected. Unable to exit ftom the batch control screen(hourglass still running for over an hour). Removed reticles from system through material handling. Exited and restarted the system software. Checked IQC- Still good. Had Rostem retry has wafer. Wafer exposed with no problem. GS -- The information contained in this communication and any attachments is confidential and may be privileged, and is for the sole use of the intended recipient(s). Any unauthorized review, use, disclosure or distribution is prohibited. If you are not the intended recipient, please notify the sender immediately by replying to this message and destroy all copies of this message and any attachments. ASML is neither liable for the proper and complete transmission of the information contained in this communication, nor for any delay in its receipt.