Shutdown asml SNF 2007-07-09 09:12:18: System needs lamp change.
gsosa at snf.stanford.edu
gsosa at snf.stanford.edu
Mon Jul 9 09:12:19 PDT 2007
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Problem asml SNF 2007-06-22 13:28:20: chilled water and compressed air
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Shutdown asml SNF 2007-07-09 09:12:18: System needs lamp change.
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ASML will be here this morning 7/9 to change the lamp.
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Problem asml SNF 2007-06-22 13:28:20: chilled water and compressed air
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Shutdown asml SNF 2007-07-09 09:12:18: System needs lamp change.
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