Shutdown asml SNF 2007-07-09 09:12:18: System needs lamp change.

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Jul 9 13:26:16 PDT 2007


ASM-L field service engineer extended the life of the lamp. They rstated the lamp and checked uniformity/intensity.  ASM-L ardered a new lamp and they will replace the lamp as soon as it becomes available. 




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