Problem asml SNF 2007-07-16 16:11:48: ASM-L is out of focus

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Jul 16 16:11:48 PDT 2007


The IQC test indicates that focus is at .82 microns. The focus is out of range for the IQC to update. Checked several times througout the day. Also nothing unusual happened over the weekend. I do have a call into ASM-L Field Service. I will also check the IQC first thing in the morning to see if focus improves.




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