Comment asml SNF 2007-07-18 17:32:00: Focus problem on ASM Stepper

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Jul 18 17:32:00 PDT 2007


Field service is troubleshooting the focus drift problem on the ASM stepper. Adjusting the the lens pressure from 4.1mbar to 4.5 mbar did not bring the focus back into spec. Also, F/S trying to aquire and load into our stepper the 4" diagnostic test jobs.  




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