Problem asml SNF 2007-07-16 16:11:48: ASM-L is out of focus

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Jul 20 16:38:27 PDT 2007


Field service adjusted and monitored the lens gas pressure. The pressure is stable at 4 mBar. The system focus was adjusted and a new reference state defined. System ready to use.




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