Comment asml SNF 2007-07-30 09:21:27: IQC Test

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Jul 30 09:21:27 PDT 2007


Unable to run IQC test.System not communicating with IA Driver. Reset system CPU's. Did full start up. Ran IQC test. All OK. Focus at -10 nm  GS




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