Comment asml SNF 2007-07-30 09:21:27: IQC Test

Binder Mann binder.mann at asml.com
Mon Jul 30 10:42:52 PDT 2007


 
Hi Gary,
Did you look at the log what was the error? We can also check as we will
be there tomorrow.
Thanks and regards, Binder

-----Original Message-----
From: gsosa at snf.stanford.edu [mailto:gsosa at snf.stanford.edu] 
Sent: Monday, July 30, 2007 09:21
To: asml-pcs at snf.stanford.edu
Subject: Comment asml SNF 2007-07-30 09:21:27: IQC Test

Unable to run IQC test.System not communicating with IA Driver. Reset
system CPU's. Did full start up. Ran IQC test. All OK. Focus at -10 nm
GS



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