Problem asml SNF 2007-07-30 12:14:08: rostem is running the system and
mahnaz at snf.stanford.edu
mahnaz at snf.stanford.edu
Mon Jul 30 12:14:08 PDT 2007
exposed one wafer but only one field exposed and an error
came up, the system is stuck . I have left Gary an voice mail.
More information about the asml-pcs
mailing list