Problem asml SNF 2007-07-30 12:14:08: rostem is running the system and

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Jul 30 14:42:06 PDT 2007


Logging screen indicated a leveling problem and wafer was rejected. Unable to exit ftom the batch control screen(hourglass still running for over an hour). Removed reticles from system through material handling. Exited and restarted the system software. Checked IQC- Still good. Had Rostem retry has wafer. Wafer exposed with no problem.  GS




More information about the asml-pcs mailing list