From mahnaz at snf.stanford.edu  Thu Jun 14 09:06:22 2007
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Thu, 14 Jun 2007 09:06:22 -0700
Subject: Comment asml SNF 2007-06-14 09:06:21: mario and I need to be shown how to refil 
Message-ID: <mailman.1.1356281027.3396.asml-pcs@snf.stanford.edu>

water



From rissman at snf.stanford.edu  Mon Jun 18 08:46:28 2007
From: rissman at snf.stanford.edu (rissman at snf.stanford.edu)
Date: Mon, 18 Jun 2007 08:46:28 -0700
Subject: Problem asml SNF 2007-03-23 09:54:34: system is in set up
Message-ID: <mailman.2.1356281027.3396.asml-pcs@snf.stanford.edu>

System ran first wafers for users on 6/15.



From mahnaz at snf.stanford.edu  Thu Jun 21 10:18:54 2007
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Thu, 21 Jun 2007 10:18:54 -0700
Subject: Problem asml SNF 2007-06-21 10:18:54: calibration
Message-ID: <mailman.3.1356281027.3396.asml-pcs@snf.stanford.edu>

during conversion and calibration failed (carrier height take
 overcal failed due to optical light lever too low), called FSE, waiting for response



From mahnaz at snf.stanford.edu  Thu Jun 21 10:21:07 2007
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Thu, 21 Jun 2007 10:21:07 -0700
Subject: Shutdown asml SNF 2007-06-21 10:21:07: 
Message-ID: <mailman.4.1356281027.3396.asml-pcs@snf.stanford.edu>

during conversion and calibration failed (carrier height take
 overcal failed due to optical light lever too low), called FSE, waiting for response



From mahnaz at snf.stanford.edu  Thu Jun 21 16:23:42 2007
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Thu, 21 Jun 2007 16:23:42 -0700
Subject: Problem asml SNF 2007-06-21 10:18:54: calibration
Message-ID: <mailman.5.1356281027.3396.asml-pcs@snf.stanford.edu>

Alex FSE adjusted the laser for wafer detection for indexer
and performed caliberation. Other tests still needs to be
 performed.



From mahnaz at snf.stanford.edu  Thu Jun 21 16:24:18 2007
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Thu, 21 Jun 2007 16:24:18 -0700
Subject: Shutdown asml SNF 2007-06-21 10:21:07: 
Message-ID: <mailman.6.1356281027.3396.asml-pcs@snf.stanford.edu>

Alex FSE adjusted the laser for wafer detection for indexer
and performed caliberation. Other tests still needs to be
 performed.



From mahnaz at snf.stanford.edu  Fri Jun 22 13:28:20 2007
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Fri, 22 Jun 2007 13:28:20 -0700
Subject: Problem asml SNF 2007-06-22 13:28:20: chilled water and compressed air
Message-ID: <mailman.7.1356281027.3396.asml-pcs@snf.stanford.edu>

Was lost last night for a period of say 1 hour.
Lamp was shut down, Cd unit was off and focus has drifted.
As of right now the unit  would be ready around 2 pm.
Binder and Michael were here to help.