Problem asml SNF 2007-06-22 13:28:20: chilled water and compressed air

mahnaz at mahnaz at
Fri Jun 22 13:28:20 PDT 2007

Was lost last night for a period of say 1 hour.
Lamp was shut down, Cd unit was off and focus has drifted.
As of right now the unit  would be ready around 2 pm.
Binder and Michael were here to help.

More information about the asml-pcs mailing list