Problem asml SNF 2007-10-09 14:50:46: level sensor set capture problem.

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Oct 9 17:01:59 PDT 2007


Found wafer stranded on WTS robot. Software would not abort batch completely. Reset CPU's and rebooted PAS system software. Did full startup and removed wafer. Latch and cover for the output indexer were loose. Suspect that a sensor was not made causing the wafer handling problem. Tightened up all covers and tested latches and sensors. All OK.  GS




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