Shutdown asml SNF 2007-10-22 11:05:23: Lens gas shut off

gsosa at gsosa at
Mon Oct 22 11:05:24 PDT 2007

Power to gas panel in basement tripped off temporarily stopping flow of He/O2 to stepper lens. Restored power to the gas panel. Gas  panel switched over to "Left" bottle. Checked and adjusted pressure to 80 PSI delivery pressure. Need to monitor stepper and wait for lens pressure to stabilize.  GS  

More information about the asml-pcs mailing list