Shutdown asml SNF 2007-10-22 11:05:23: Lens gas shut off

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Oct 22 15:27:34 PDT 2007


Restored power to gas panel. Will monitor the focus drift overnight. The system is within the focus limits but I expect it to drift. If you are exposing large features, it may be OK. Please run IQC test before processsing wafers. Focus mean should be less than < 200nm.  GS 




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