From gsosa at snf.stanford.edu Tue Sep 4 10:07:30 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 4 Sep 2007 10:07:30 -0700 Subject: Comment asml SNF 2007-09-04 10:07:29: ASML Vendor is here Message-ID: ASML vendor is here working on the XY stage problem. From mtang at snf.stanford.edu Tue Sep 4 16:48:09 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 4 Sep 2007 16:48:09 -0700 Subject: Comment asml SNF 2007-09-04 16:48:09: Update as per Alex Fong Red 8/31/07 Shutdown Message-ID: The stepper has circuit board issue (according to field service), he placed order for new board. Hopefully, stepper will be up late Wednesday or Thursday. From gsosa at snf.stanford.edu Wed Sep 5 15:01:19 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 5 Sep 2007 15:01:19 -0700 Subject: Shutdown asml SNF 2007-08-31 12:06:44: System down for XY stage problem Message-ID: System actually had a wafer handling problem. If wafer handling does not initialize 1st, the XY stage will not initialize either. Field service troubleshot and replaced the motion 3 pc board in the WTS rack. System initialized as normal. 4 inch wafer handling calibration performed. Lamp restarted and uniformity checked. All OK at 1.59%. Ran IQC test - All OK. System up and ready for use. GS From gsosa at snf.stanford.edu Wed Sep 5 15:02:21 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 5 Sep 2007 15:02:21 -0700 Subject: Comment asml SNF 2007-09-04 10:07:29: ASML Vendor is here Message-ID: System is back up. See Shutdown comments 8/31/07. GS From gsosa at snf.stanford.edu Wed Sep 5 15:03:04 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 5 Sep 2007 15:03:04 -0700 Subject: Comment asml SNF 2007-09-04 16:48:09: Update as per Alex Fong Red 8/31/07 Shutdown Message-ID: System is back up and ready for use. See Shutdown comments 8/31/07. GS From fengj at snf.stanford.edu Wed Sep 5 20:35:04 2007 From: fengj at snf.stanford.edu (fengj at snf.stanford.edu) Date: Wed, 5 Sep 2007 20:35:04 -0700 Subject: Problem asml SNF 2007-09-05 20:35:04: Stuck in batch Message-ID: After the input cassette went down, the output cassette was stuck half way down. The system won't allow exit/cancel the batch. My wafers are still in the input cassette. From fengj at snf.stanford.edu Wed Sep 5 20:37:27 2007 From: fengj at snf.stanford.edu (fengj at snf.stanford.edu) Date: Wed, 5 Sep 2007 20:37:27 -0700 Subject: Problem asml SNF 2007-09-05 20:37:27: cannot log in Message-ID: We tried exiting the software. But the user name and password given in the manual does not work when logging in. From gsosa at snf.stanford.edu Thu Sep 6 08:34:16 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 6 Sep 2007 08:34:16 -0700 Subject: Problem asml SNF 2007-09-05 20:35:04: Stuck in batch Message-ID: Software probably got hung up. Will review the errorlog with Binder. ASM-L applications software accidentally terminated. The login and password were incorrect in the work instruction. Rebooted the PAS software. Did a full startup-OK. Checked IQC-OK. User processed his wafers with no problems. GS From gsosa at snf.stanford.edu Thu Sep 6 08:35:01 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 6 Sep 2007 08:35:01 -0700 Subject: Problem asml SNF 2007-09-05 20:37:27: cannot log in Message-ID: See comments from problem 9/5/2007. System is OK to use. GS From gsosa at snf.stanford.edu Thu Sep 13 08:10:56 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 13 Sep 2007 08:10:56 -0700 Subject: Shutdown asml SNF 2007-09-13 08:10:55: Focus shift Message-ID: Focus shifted overnight from 3 nanometers to +900 nanometers(.9 microns). Gas bottle switched over manually yesterday. Gas delivery pressure has been stable since switchover at 75 PSI. GS From gsosa at snf.stanford.edu Thu Sep 13 13:44:18 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 13 Sep 2007 13:44:18 -0700 Subject: Shutdown asml SNF 2007-09-13 08:10:55: Focus shift Message-ID: Focus adjusted by ASM-l and verified in IQC test. System is up and ready to use. GS From maryamzm at snf.stanford.edu Wed Sep 19 21:35:24 2007 From: maryamzm at snf.stanford.edu (maryamzm at snf.stanford.edu) Date: Wed, 19 Sep 2007 21:35:24 -0700 Subject: Comment asml SNF 2007-09-19 21:35:24: Message-ID: Everyone, please close up the SMIF box after you're done with your exposure. Today I came to find the box sitting open on the elevator with people's masks in it. Masks could get dirty or damaged. Thanks! From binder.mann at asml.com Thu Sep 20 07:55:22 2007 From: binder.mann at asml.com (Binder Mann) Date: Thu, 20 Sep 2007 10:55:22 -0400 Subject: Comment asml SNF 2007-09-19 21:35:24: In-Reply-To: <20070920043542.121204D159@smtp2.stanford.edu> Message-ID: <0788D5A046D0134DB5F0CEF36E4EBF6133CC85@USWILX84.sn-us.asml.com> Thanks Maryam, I found the SMIF box open last week also, People should be responsible for their own reticle and make sure to close the SMIF box after removing their reticle. Thanks again for pointing this out. Regards, Binder -----Original Message----- From: maryamzm at snf.stanford.edu [mailto:maryamzm at snf.stanford.edu] Sent: Wednesday, September 19, 2007 21:35 To: asml-pcs at snf.stanford.edu Subject: Comment asml SNF 2007-09-19 21:35:24: Everyone, please close up the SMIF box after you're done with your exposure. Today I came to find the box sitting open on the elevator with people's masks in it. Masks could get dirty or damaged. Thanks! -- The information contained in this communication and any attachments is confidential and may be privileged, and is for the sole use of the intended recipient(s). Any unauthorized review, use, disclosure or distribution is prohibited. Unless explicitly stated otherwise in the body of this communication or the attachment thereto (if any), the information is provided on an AS-IS basis without any express or implied warranties or liabilities. To the extent you are relying on this information, you are doing so at your own risk. If you are not the intended recipient, please notify the sender immediately by replying to this message and destroy all copies of this message and any attachments. ASML is neither liable for the proper and complete transmission of the information contained in this communication, nor for any delay in its receipt. From gibby at snf.stanford.edu Sun Sep 23 23:25:44 2007 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Sun, 23 Sep 2007 23:25:44 -0700 Subject: Problem asml SNF 2007-09-23 23:25:43: System did not expose final fields Message-ID: Most fields exposed normally, but the final fields (around the edge of the wafer) would not expose. Happened on two wafers, consecutive batches. From binder.mann at asml.com Mon Sep 24 06:56:42 2007 From: binder.mann at asml.com (Binder Mann) Date: Mon, 24 Sep 2007 09:56:42 -0400 Subject: Problem asml SNF 2007-09-23 23:25:43: System did not expose final fields In-Reply-To: <20070924062544.AC6654C673@smtp3.stanford.edu> Message-ID: <0788D5A046D0134DB5F0CEF36E4EBF61DAE75C@USWILX84.sn-us.asml.com> Hi Gibby, Can you please send us the error log so we can check what went wrong and if you have problem pleas ask Gary Sosa he will be able to help you. Thanks and regards, Binder -----Original Message----- From: gibby at snf.stanford.edu [mailto:gibby at snf.stanford.edu] Sent: Sunday, September 23, 2007 11:26 PM To: asml-pcs at snf.stanford.edu Subject: Problem asml SNF 2007-09-23 23:25:43: System did not expose final fields Most fields exposed normally, but the final fields (around the edge of the wafer) would not expose. Happened on two wafers, consecutive batches. -- The information contained in this communication and any attachments is confidential and may be privileged, and is for the sole use of the intended recipient(s). Any unauthorized review, use, disclosure or distribution is prohibited. Unless explicitly stated otherwise in the body of this communication or the attachment thereto (if any), the information is provided on an AS-IS basis without any express or implied warranties or liabilities. To the extent you are relying on this information, you are doing so at your own risk. If you are not the intended recipient, please notify the sender immediately by replying to this message and destroy all copies of this message and any attachments. ASML is neither liable for the proper and complete transmission of the information contained in this communication, nor for any delay in its receipt. From gsosa at snf.stanford.edu Mon Sep 24 16:26:33 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 24 Sep 2007 16:26:33 -0700 Subject: Problem asml SNF 2007-09-23 23:25:43: System did not expose final fields Message-ID: Recreated problem with Gibby. Wafers after his deposition step would error out. System could not focus or level on the die at the top edge of the wafer. Same wafers prior to deposition do not have this problem. The wafers are probably stressed/bowed from the metal dep. Gibby will discuss with ASM-l if there are edge toleranced that can be increased, or he may just delete the edge die. System OK to use. GS From gsosa at snf.stanford.edu Thu Sep 27 14:17:28 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Sep 2007 14:17:28 -0700 Subject: Comment asml SNF 2007-09-27 14:17:27: Monthly PM on Tuesday 10/2 Message-ID: ASM will be doing a monthly PM on Tuesday 10/2. The tool will not be available from 8:00 AM to 4:00PM. Please check on coral in case PM is completed early. GS From gsosa at snf.stanford.edu Thu Sep 27 17:21:25 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 Sep 2007 17:21:25 -0700 Subject: Comment asml SNF 2007-09-27 17:21:25: Lamp Change Completed Message-ID: Vendor replaced and set up uv lamp. System ready to use. GS From gsosa at snf.stanford.edu Fri Sep 28 09:48:30 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 28 Sep 2007 09:48:30 -0700 Subject: Comment asml SNF 2007-09-28 09:48:30: Lamp house latch repair Message-ID: During the lamp change the latch for the lamp house broke. The shaft that releases the latch broke off of its mount and prevented the door from being open. Removed the latch and fabricated a temporary new shaft. Tested latching mechanism. All OK. Door lcoses and tatches OK. Pushing up on the shaft releases the latch and the door opens. GS