Shutdown asml SNF 2007-08-31 12:06:44: System down for XY stage problem

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Sep 5 15:01:19 PDT 2007


System actually had a wafer handling problem. If wafer handling does not initialize 1st, the XY stage will not initialize either. Field service troubleshot and replaced the motion 3 pc board in the WTS rack. System initialized as normal. 4 inch wafer handling calibration performed. Lamp restarted and uniformity checked. All OK at 1.59%. Ran IQC test - All OK. System up and ready for use.  GS




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