Problem asml SNF 2007-09-05 20:35:04: Stuck in batch

fengj at snf.stanford.edu fengj at snf.stanford.edu
Wed Sep 5 20:35:04 PDT 2007


After the input cassette went down, the output cassette was stuck half way down. The system won't allow exit/cancel the batch. My wafers are still in the input cassette.




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