Shutdown asml SNF 2007-09-13 08:10:55: Focus shift

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Sep 13 08:10:56 PDT 2007

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Focus shifted overnight from 3 nanometers to +900 nanometers(.9 microns). Gas bottle switched over manually yesterday. Gas delivery pressure has been stable since switchover at 75 PSI.   GS

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