Problem asml SNF 2007-09-23 23:25:43: System did not expose final fields

Binder Mann binder.mann at asml.com
Mon Sep 24 06:56:42 PDT 2007


 Hi Gibby,
Can you please send us the error log so we can check what went wrong and
if you have problem pleas ask Gary Sosa he will be able to help you.
Thanks and regards, Binder

-----Original Message-----
From: gibby at snf.stanford.edu [mailto:gibby at snf.stanford.edu] 
Sent: Sunday, September 23, 2007 11:26 PM
To: asml-pcs at snf.stanford.edu
Subject: Problem asml SNF 2007-09-23 23:25:43: System did not expose
final fields

Most fields exposed normally, but the final fields (around the edge of
the wafer) would not expose.  Happened on two wafers, consecutive
batches.



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