Problem asml SNF 2007-09-23 23:25:43: System did not expose final fields

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Sep 24 16:26:33 PDT 2007


Recreated problem with Gibby. Wafers after his deposition step would error out. System could not focus or level on the die at the top edge of the wafer. Same wafers prior to deposition do not have this problem. The wafers are probably stressed/bowed from the metal dep. Gibby will discuss with ASM-l if there are edge toleranced that can be increased, or he may just delete the edge die. System OK to use.  GS




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