From mtang at snf.stanford.edu Wed Apr 2 09:34:51 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 2 Apr 2008 09:34:51 -0700 Subject: Comment asml SNF 2008-04-02 09:34:50: ASML Schedule today Message-ID: 8" stage demo experiment has been postponed. ASML still has reservations and priority use for today, but labmembers may use the system if idle. From gsosa at snf.stanford.edu Wed Apr 2 13:05:50 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 2 Apr 2008 13:05:50 -0700 Subject: Comment asml SNF 2008-04-02 13:05:50: Weekly data collection Message-ID: Weekly data collection and s/w patch installed by vendor. From gsosa at snf.stanford.edu Wed Apr 2 13:29:17 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 2 Apr 2008 13:29:17 -0700 Subject: Comment asml SNF 2008-04-02 13:29:16: Status change 4/2 Message-ID: The 8" demo scheduled for this week( 4/2 through 4/4 ) is currently on hold. The tool is still configured for 4 inch wafers and is available for use until 8:30 tomorrow morning(4/3). We will keep you posted on any more changes in status or schedules. From gsosa at snf.stanford.edu Thu Apr 3 11:41:07 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 3 Apr 2008 11:41:07 -0700 Subject: Comment asml SNF 2008-04-03 11:41:07: Focus Check Message-ID: Shot and read FEM to verify the IQC focus drift. FEM wafer ave. focus is -0.2 microns. IQC test indicated - 19 nanometers. System focus verified OK. System OK to use From gsosa at snf.stanford.edu Thu Apr 3 15:49:32 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 3 Apr 2008 15:49:32 -0700 Subject: Comment asml SNF 2008-04-03 15:49:31: ASM-L Status Update 4/3 Message-ID: The 3-D align installation originally scheduled for the week of 4/7 through 4/11 and 4/14 through 4/18 has been rescheduled. The new schedule is 4/14 through 4/18 and 4/21 through 4/25. Schedules have been posted outside the lab and at the stepper. The stepper is up and available for 4" wafer processing through next week. From king at snf.stanford.edu Thu Apr 3 22:36:03 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 3 Apr 2008 22:36:03 -0700 Subject: Comment asml SNF 2008-04-03 22:36:02: doesn't always load in wafers Message-ID: Intermittent problem, same as last night. "Initial carrier and retry inspection." Trying it again repeatedly seems to work. From gsosa at snf.stanford.edu Fri Apr 4 08:33:38 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 4 Apr 2008 08:33:38 -0700 Subject: Problem asml SNF 2008-04-04 08:33:37: Carrier inspection problem Message-ID: The following problem reported by user- Intermittent problem, same as last night. "Initial carrier and retry inspection." Trying it again repeatedly seems to work. From gsosa at snf.stanford.edu Fri Apr 4 08:45:12 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 4 Apr 2008 08:45:12 -0700 Subject: Problem asml SNF 2008-04-04 08:33:37: Carrier inspection problem Message-ID: System event log indicated low intensity during carrier inspection. Was able to reproduce the problem several times. Found that the hinges for port #4 cover were loose causing misposition when the cover was closed. When the cover was mis-positioned enough the sensor to activate the inspecion laser was not satisfied and the inspection would fail. Tightened up hinges on port # 4 and port #3. Retested carrier inspection several times opening andclosing cover inbetween the tests. All OK now. From gsosa at snf.stanford.edu Fri Apr 4 08:45:23 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 4 Apr 2008 08:45:23 -0700 Subject: Comment asml SNF 2008-04-03 22:36:02: doesn't always load in wafers Message-ID: System event log indicated low intensity during carrier inspection. Was able to reproduce the problem several times. Found that the hinges for port #4 cover were loose causing misposition when the cover was closed. When the cover was mis-positioned enough the sensor to activate the inspecion laser was not satisfied and the inspection would fail. Tightened up hinges on port # 4 and port #3. Retested carrier inspection several times opening andclosing cover inbetween the tests. All OK now. From sbasumal at snf.stanford.edu Fri Apr 4 09:14:21 2008 From: sbasumal at snf.stanford.edu (sbasumal at snf.stanford.edu) Date: Fri, 4 Apr 2008 09:14:21 -0700 Subject: Problem asml SNF 2008-04-04 09:14:20: Message-ID: From gsosa at snf.stanford.edu Fri Apr 4 10:46:51 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 4 Apr 2008 10:46:51 -0700 Subject: Problem asml SNF 2008-04-04 09:14:20: Message-ID: From gsosa at snf.stanford.edu Wed Apr 9 10:05:15 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 9 Apr 2008 10:05:15 -0700 Subject: Shutdown asml SNF 2008-04-09 10:05:14: System out of focus Message-ID: There was a power glith that put the C&T unit into an error state and stopped temperature control to the stepper. The stepper is currently -300 nm out of focus. Will let tool stabilize and monitor system focus. Please check back in coral for tool status. From bindermann at snf.stanford.edu Wed Apr 9 11:04:02 2008 From: bindermann at snf.stanford.edu (bindermann at snf.stanford.edu) Date: Wed, 9 Apr 2008 11:04:02 -0700 Subject: Shutdown asml SNF 2008-04-09 10:05:14: System out of focus Message-ID: Checked IQC and focus after stabilization. System checked out okay. System up to run wafers From mahnaz at snf.stanford.edu Wed Apr 9 15:16:34 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 9 Apr 2008 15:16:34 -0700 Subject: Comment asml SNF 2008-04-09 15:16:34: monthly PM Message-ID: the pm will be performed during 9 am to 2 pm, tomorrow 4/10. From bindermann at snf.stanford.edu Thu Apr 10 14:10:44 2008 From: bindermann at snf.stanford.edu (bindermann at snf.stanford.edu) Date: Thu, 10 Apr 2008 14:10:44 -0700 Subject: Comment asml SNF 2008-04-09 15:16:34: monthly PM Message-ID: System checks okay. System up to expose wafers From munehiro at snf.stanford.edu Fri Apr 11 22:57:38 2008 From: munehiro at snf.stanford.edu (munehiro at snf.stanford.edu) Date: Fri, 11 Apr 2008 22:57:38 -0700 Subject: Problem asml SNF 2008-04-11 22:57:38: wafer in P-chuck Message-ID: Wafer was stuck ro P-chuck. I stopped the batch. My wafers are still inside. From ofidaner at snf.stanford.edu Mon Apr 14 08:22:52 2008 From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu) Date: Mon, 14 Apr 2008 08:22:52 -0700 Subject: Comment asml SNF 2008-04-14 08:22:52: gary cleared the wafers Message-ID: From gsosa at snf.stanford.edu Mon Apr 14 08:56:21 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 14 Apr 2008 08:56:21 -0700 Subject: Problem asml SNF 2008-04-11 22:57:38: wafer in P-chuck Message-ID: Removed the wafers from the system. Re-initialized all hardware. From gsosa at snf.stanford.edu Mon Apr 14 08:56:57 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 14 Apr 2008 08:56:57 -0700 Subject: Shutdown asml SNF 2008-04-14 08:56:57: 3-D align Install Message-ID: System is down for 3-D align installation. From gsosa at snf.stanford.edu Fri Apr 18 15:06:40 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 18 Apr 2008 15:06:40 -0700 Subject: Comment asml SNF 2008-04-18 15:06:39: Tool Update 4/18 Message-ID: ASM-L has completed 1st phase of 3D align install. Machine is converted back to 4" wafer size. All needed calibrations and test completed. IQC test also looks good. System will be released by Mahnaz. From mahnaz at snf.stanford.edu Fri Apr 18 16:15:25 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 18 Apr 2008 16:15:25 -0700 Subject: Shutdown asml SNF 2008-04-14 08:56:57: 3-D align Install Message-ID: has been noted From sbasumal at snf.stanford.edu Sat Apr 19 21:23:33 2008 From: sbasumal at snf.stanford.edu (sbasumal at snf.stanford.edu) Date: Sat, 19 Apr 2008 21:23:33 -0700 Subject: Shutdown asml SNF 2008-04-19 21:23:32: Wafer stuck.... Message-ID: Machine says ..." A wafer is probably lost in the machine, which was expected on: p unit, dipod load". I had run the same wafer multiple times today to check for alignment so am fairly sure wafer is flat. Ed has asked Gary Sosa to come in and retrieve wafer , possibly tomorrow morning. From gsosa at snf.stanford.edu Sat Apr 19 23:34:30 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sat, 19 Apr 2008 23:34:30 -0700 Subject: Shutdown asml SNF 2008-04-19 21:23:32: Wafer stuck.... Message-ID: It appears that wafer slipped off of dipod while attempting to move from P/A to E-chuck. Retrieved and inspected wafer. There was nothing unusual about the wafer. The backside had no visible contamination and it floated very well on UTS granite. Wiped down the dipod arm, P/A chuck and robot arm with IPA. Cycled 30 wafers through tool with no problem. Cycled users wafer through tool( no exposure ) twice with no problems. System is up and ready to use. Users (sbasumal) wafer is in single wafer carrier at stepper. GS From gsosa at snf.stanford.edu Sat Apr 19 23:47:45 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sat, 19 Apr 2008 23:47:45 -0700 Subject: Comment asml SNF 2008-04-19 23:47:44: Update 4/19/08 Message-ID: It appears that wafer slipped off of dipod while attempting to move from P/A to E-chuck. Retrieved and inspected wafer. There was nothing unusual about the wafer. The backside had no visible contamination and it floated very well on UTS granite. Wiped down the dipod arm, P/A chuck and robot arm with IPA. Cycled 30 wafers through tool with no problem. Cycled users wafer through tool( no exposure ) twice with no problems. System is up and ready to use. Users (sbasumal) wafer is in single wafer carrier at stepper. GS From gsosa at snf.stanford.edu Mon Apr 21 10:30:18 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 21 Apr 2008 10:30:18 -0700 Subject: Shutdown asml SNF 2008-04-21 10:30:17: 3D align install Message-ID: System is down to ASM-L for installation of 3D align upgrade. ASM-L is also doing a scheduled UV lamp change. From gsosa at snf.stanford.edu Fri Apr 25 21:15:42 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 25 Apr 2008 21:15:42 -0700 Subject: Comment asml SNF 2008-04-25 21:15:42: Tool Status 4/25/2008 Message-ID: The stepper is still down. ASM-L checked and updated red and white light focus and updated tilt maching. Red/blue test (machine matching to itself) is failing and cannot be corrected through software. X / Y translation, rotation and reticle height are out of spec. Metrology setup will continue on Monday morning and may require mechanical setups within the tool to bring the tool back into specification. GS From gsosa at snf.stanford.edu Mon Apr 28 20:00:01 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 28 Apr 2008 20:00:01 -0700 Subject: Shutdown asml SNF 2008-04-21 10:30:17: 3D align install Message-ID: System is back up for 4" wafer processing. ASM-L did the following to bring the tool up: 1) Cleaned the reticle table and reticle. 2) Checked and re-determined Basic Machine Constants and fine tuned wafer shifts. 3) Verified with red-blue tests with software updates- Still out of spec( Reticle table tilt). 4) Mechanically adjusted reticle table tilt with factory tooling and retested with red-blue test- Reticle table tilt now within spec(< 10 microns). All other critical parameters also within spec. 5) Verified white lite focus and redefined the image sensor reference state. 6) Converted the tool back to 4" and did all needed calibrations. System is up and ready for use. Users please shoot a test wafer before exposing all wafers and inspect for alignment. Please report any problems in Coral. From gsosa at snf.stanford.edu Mon Apr 28 20:00:55 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 28 Apr 2008 20:00:55 -0700 Subject: Comment asml SNF 2008-04-28 20:00:54: Tool status 4/28/2008 Message-ID: System is back up for 4" wafer processing. ASM-L did the following to bring the tool up: 1) Cleaned the reticle table and reticle. 2) Checked and re-determined Basic Machine Constants and fine tuned wafer shifts. 3) Verified with red-blue tests with software updates- Still out of spec( Reticle table tilt). 4) Mechanically adjusted reticle table tilt with factory tooling and retested with red-blue test- Reticle table tilt now within spec(< 10 microns). All other critical parameters also within spec. 5) Verified white lite focus and redefined the image sensor reference state. 6) Converted the tool back to 4" and did all needed calibrations. System is up and ready for use. Users please shoot a test wafer before exposing all wafers and inspect for alignment. Please report any problems in Coral.