Comment asml SNF 2008-04-03 11:41:07: Focus Check

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Apr 3 11:41:07 PDT 2008


Shot and read FEM to verify the IQC focus drift. FEM wafer ave. focus is  -0.2 microns. IQC test indicated - 19 nanometers. System focus verified OK. System OK to use




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