Comment asml SNF 2008-04-03 15:49:31: ASM-L Status Update 4/3

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Apr 3 15:49:32 PDT 2008


 The 3-D align installation originally scheduled for the week of 4/7 through 4/11 and 4/14 through 4/18 has been rescheduled. The new schedule is 4/14 through 4/18 and 4/21 through 4/25. Schedules have been posted outside the lab and at the stepper. The stepper is up and available for 4" wafer processing through next week.




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