Comment asml SNF 2008-04-03 22:36:02: doesn't always load in wafers

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Apr 4 08:45:23 PDT 2008


System event log indicated low intensity during carrier inspection. Was able to reproduce the problem several times. Found that the hinges for port #4 cover were loose causing misposition when  the cover was closed.  When the cover was mis-positioned enough the sensor to activate the inspecion laser was not satisfied and the inspection would fail. Tightened up hinges on port # 4 and port #3. Retested carrier inspection several times opening andclosing cover inbetween the tests. All OK now.




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