Shutdown asml SNF 2008-04-09 10:05:14: System out of focus

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Apr 9 10:05:15 PDT 2008


There was a power glith that put the C&T unit into an error state and stopped temperature control to the stepper. The stepper is currently -300 nm out of focus. Will let tool stabilize and monitor system focus. Please check back in coral for tool status.




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