Comment asml SNF 2008-04-09 15:16:34: monthly PM
bindermann at snf.stanford.edu
bindermann at snf.stanford.edu
Thu Apr 10 14:10:44 PDT 2008
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Comment asml SNF 2008-04-09 15:16:34: monthly PM
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Problem asml SNF 2008-04-11 22:57:38: wafer in P-chuck
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System checks okay. System up to expose wafers
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Comment asml SNF 2008-04-09 15:16:34: monthly PM
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Problem asml SNF 2008-04-11 22:57:38: wafer in P-chuck
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