Problem asml SNF 2008-04-11 22:57:38: wafer in P-chuck

munehiro at snf.stanford.edu munehiro at snf.stanford.edu
Fri Apr 11 22:57:38 PDT 2008


Wafer was stuck ro P-chuck. I stopped the batch. My wafers are still inside. 




More information about the asml-pcs mailing list