Problem asml SNF 2008-04-11 22:57:38: wafer in P-chuck
gsosa at snf.stanford.edu
gsosa at snf.stanford.edu
Mon Apr 14 08:56:21 PDT 2008
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Problem asml SNF 2008-04-11 22:57:38: wafer in P-chuck
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Comment asml SNF 2008-04-14 08:22:52: gary cleared the wafers
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Removed the wafers from the system. Re-initialized all hardware.
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Problem asml SNF 2008-04-11 22:57:38: wafer in P-chuck
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Comment asml SNF 2008-04-14 08:22:52: gary cleared the wafers
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