Comment asml SNF 2008-04-18 15:06:39: Tool Update 4/18

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Apr 18 15:06:40 PDT 2008


ASM-L has completed 1st phase of 3D align install. Machine is converted back to 4" wafer size. All needed calibrations and test completed. IQC test also looks good. System will be released by Mahnaz. 




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