Comment asml SNF 2008-04-18 15:06:39: Tool Update 4/18

gsosa at gsosa at
Fri Apr 18 15:06:40 PDT 2008

ASM-L has completed 1st phase of 3D align install. Machine is converted back to 4" wafer size. All needed calibrations and test completed. IQC test also looks good. System will be released by Mahnaz. 

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