Shutdown asml SNF 2008-04-19 21:23:32: Wafer stuck....

sbasumal at snf.stanford.edu sbasumal at snf.stanford.edu
Sat Apr 19 21:23:33 PDT 2008


Machine says ..." A wafer is probably lost  in the machine, which was expected on: p unit, dipod load".
I had run the same wafer  multiple times today to check for alignment so am fairly sure wafer is flat.
Ed has asked Gary Sosa to come in and retrieve wafer , possibly tomorrow morning.




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