Shutdown asml SNF 2008-04-19 21:23:32: Wafer stuck....

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Sat Apr 19 23:34:30 PDT 2008


It appears that wafer slipped off of dipod while attempting to move from P/A to E-chuck. Retrieved and inspected wafer. There was nothing unusual about the wafer. The backside had no visible contamination and it floated very well on UTS granite. Wiped down the dipod arm, P/A chuck and robot arm with IPA. Cycled 30 wafers through tool with no problem. Cycled users wafer through tool( no exposure ) twice with no problems. System is up and ready to use. Users (sbasumal) wafer is in single wafer carrier at stepper. GS




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