Comment asml SNF 2008-04-25 21:15:42: Tool Status 4/25/2008

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Apr 25 21:15:42 PDT 2008


The stepper is still down. ASM-L checked and updated red and white light focus and updated tilt maching. Red/blue test (machine matching to itself) is failing and cannot be corrected through software. X / Y translation, rotation and reticle height are out of spec. Metrology setup will continue on Monday morning and may require mechanical setups within the tool to bring the tool back into specification.  GS




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