Shutdown asml SNF 2008-04-21 10:30:17: 3D align install

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Apr 28 20:00:01 PDT 2008


System is back up for 4" wafer processing. ASM-L did the following to bring the tool up: 1) Cleaned the reticle table and reticle. 2) Checked and re-determined Basic Machine Constants and fine tuned wafer shifts. 3) Verified with red-blue tests with software updates- Still out of spec( Reticle table tilt). 4) Mechanically adjusted reticle table tilt with factory tooling and retested with red-blue test- Reticle table tilt now within spec(< 10 microns). All other critical parameters also within spec. 5) Verified white lite focus and redefined the image sensor reference state. 6) Converted the tool back to 4" and did all needed calibrations. System is up and ready for use. Users please shoot a test wafer before exposing all wafers and inspect for alignment. Please report any problems in Coral.




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