Shutdown asml SNF 2008-08-13 10:07:03: exahust work

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Aug 13 14:15:39 PDT 2008


The exhaust work is completed. Restarted and warmed up the lamp. Checked uniformity- OK @ 1.7%. Ran IQC test all critical parameters are in spec. System OK to use.




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