Shutdown asml SNF 2008-08-17 11:03:35: Testing in Progress

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Sun Aug 17 19:27:54 PDT 2008


Completed metrology measurement of 14 overlay wafers. The data will be modeled and reviewed by ASML applications group. System is back up and ready to use.




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