Comment asml SNF 2008-08-18 17:50:36: Update 8/18/2008

gsosa at gsosa at
Mon Aug 18 17:50:37 PDT 2008

The stepper stepper is still down. The temperature 63 degrees and humidity 63% in the lab are out of spec and causing tool stabilizing problems. The stepper is .25 microns out of focus.The stepper will continue to drift as the temperature drops through the night, until the lab's temp humidity controls are fully functional.  

More information about the asml-pcs mailing list