Comment asml SNF 2008-08-19 16:19:47: Tool Update 8/19/2008

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Aug 19 16:19:48 PDT 2008


The stepper is still down. Temp and humidity control was restored to the lab at 7:00 AM. We are allowing the stepper and lab to come back into equilibrium and ASML field service will check out tool tomorrow morning. As of 1:30PM the stepper focus is still drifting. 




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