Shutdown asml SNF 2008-08-22 16:16:05: shutters are not closing

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Fri Aug 22 16:16:05 PDT 2008


I hate to do this on a Friday but we found out that the shutters are not closing properly. This impact the exposure and we will see  exposer drift across each field . The part has been ordered and the FSE will be here on Monday to take care of the issue.




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