Shutdown asml SNF 2008-08-22 16:16:05: shutters are not closing

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Aug 25 15:50:59 PDT 2008


FSE checked and made adjustments to shutter assembly. There are no more light leaks and dose repeatability looks good in sevice tests. Checked E0 using KS coat process. E0 is at 57mj. This is what it was last week. Please take tests wafers to verify your process and exposure. I will have the applications group retest E0 in the morning. 




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