Problem asml SNF 2008-08-25 15:51:34: Update 08/25/2008

gsosa at gsosa at
Mon Aug 25 15:51:36 PDT 2008

FSE checked and made adjustments to shutter assembly. There are no more light leaks and dose repeatability looks good in sevice tests. Checked E0 using KS coat process. E0 is at 57mj. This is what it was last week. Please take tests wafers to verify your process and exposure. I will have the applications group retest E0 in the morning. 

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