Problem asml SNF 2008-08-25 15:51:34: Update 08/25/2008

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Aug 26 14:35:55 PDT 2008


ASML rechecked the EO. the E0 today is at 55 mj. this is within the range that the tool has been running at (55 - 60 mj. System OK to use.




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