Comment asml SNF 2008-08-26 16:40:39: Wafer stuck in machine

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Aug 26 16:40:39 PDT 2008


There were 3 wafers stranded in the tool( P-Chuck, E-chuck and robot), E-chuck and robot wafers were exposed. P-chuck wafer had a vacuum error which caused the handling problem and stranded wafers. The problem was a vacuum sensor error when transfering from P-chuck to centering chuck in pre-aligner. Manually removed and authorized wafer out. Removed 2 other wafers through software. Cleaned the pre-align chuck with IPA. Inspected users wafer- looked OK , nothing unusual and he said it floated OK on granite. User re-ran his 2 good wafers to complete his layer processing. No problems. Advised user to try suspect wafer when staf and ASML support are here. System OK to use.




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