Comment asml SNF 2008-08-26 16:40:39: Wafer stuck in machine

gsosa at gsosa at
Tue Aug 26 16:40:39 PDT 2008

There were 3 wafers stranded in the tool( P-Chuck, E-chuck and robot), E-chuck and robot wafers were exposed. P-chuck wafer had a vacuum error which caused the handling problem and stranded wafers. The problem was a vacuum sensor error when transfering from P-chuck to centering chuck in pre-aligner. Manually removed and authorized wafer out. Removed 2 other wafers through software. Cleaned the pre-align chuck with IPA. Inspected users wafer- looked OK , nothing unusual and he said it floated OK on granite. User re-ran his 2 good wafers to complete his layer processing. No problems. Advised user to try suspect wafer when staf and ASML support are here. System OK to use.

More information about the asml-pcs mailing list