Problem asml SNF 2008-08-31 11:35:35: wafer stuck in machine

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Sun Aug 31 14:54:03 PDT 2008


Wafer recovered through software reboot by user nppatil. System ran fine afterwards. no wafer handling issues. Wafer was stuck at pre-aligner.




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