From gsosa at snf.stanford.edu Fri Feb 1 11:46:50 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 1 Feb 2008 11:46:50 -0800 Subject: Comment asml SNF 2008-02-01 11:46:45: E-Chuck cleaned Message-ID: The exposure chuck was cleaned by ASM-L S/A Group From jsuarez at snf.stanford.edu Fri Feb 1 12:38:33 2008 From: jsuarez at snf.stanford.edu (jsuarez at snf.stanford.edu) Date: Fri, 1 Feb 2008 12:38:33 -0800 Subject: Problem asml SNF 2008-02-01 12:38:33: system error occured Message-ID: after 9th wafer, stopped exposing "system error occured" message on screen. From gsosa at snf.stanford.edu Fri Feb 1 13:40:44 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 1 Feb 2008 13:40:44 -0800 Subject: Problem asml SNF 2008-02-01 12:38:33: system error occured Message-ID: Robot did not pick up wafer from input cassette. Re-iitialized the system and recovered stranded wafers. Cleaned the robot arm. Inspected useres wafers- looked good. Restarted users lot. All wafers processed successfully. System Up From ofidaner at snf.stanford.edu Sun Feb 3 09:04:06 2008 From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu) Date: Sun, 3 Feb 2008 09:04:06 -0800 Subject: Shutdown asml SNF 2008-02-03 09:04:06: wafers stuck in the tool. Message-ID: Note: The backsides of the wafers were clean!!! (NO epi rings) From gsosa at snf.stanford.edu Mon Feb 4 09:14:02 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Feb 2008 09:14:02 -0800 Subject: Shutdown asml SNF 2008-02-03 09:04:06: wafers stuck in the tool. Message-ID: Wafers recovered from stepper and P/A unit cleaned. Ran clean test wafer- OK. Ran useres wafes-Not OK.. Users wafers appear to be warpped( The wafer would not float on a flat granite stone. Daily checks done all OK. From gsosa at snf.stanford.edu Fri Feb 8 09:08:12 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 8 Feb 2008 09:08:12 -0800 Subject: Shutdown asml SNF 2008-02-08 09:08:11: Cannot ignite lamp Message-ID: Unable to start lamp after power spike. From gsosa at snf.stanford.edu Fri Feb 8 10:06:46 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 8 Feb 2008 10:06:46 -0800 Subject: Shutdown asml SNF 2008-02-08 09:08:11: Cannot ignite lamp Message-ID: Finally re-ignited lamp. All tested OK. From gsosa at snf.stanford.edu Fri Feb 8 11:05:17 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 8 Feb 2008 11:05:17 -0800 Subject: Shutdown asml SNF 2008-02-08 11:05:16: Lamp Change Message-ID: Lamp is being changed by ASML FSE From gsosa at snf.stanford.edu Fri Feb 8 13:21:09 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 8 Feb 2008 13:21:09 -0800 Subject: Shutdown asml SNF 2008-02-08 11:05:16: Lamp Change Message-ID: Lamp change completed. System OK to use From ywidjaja at snf.stanford.edu Sun Feb 10 18:26:12 2008 From: ywidjaja at snf.stanford.edu (ywidjaja at snf.stanford.edu) Date: Sun, 10 Feb 2008 18:26:12 -0800 Subject: Shutdown asml SNF 2008-02-10 18:26:12: Wafer stuck inside Message-ID: Ran 1 wafer. Received "failed to load" error message. The wafer is still inside. From gsosa at snf.stanford.edu Mon Feb 11 08:47:24 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 11 Feb 2008 08:47:24 -0800 Subject: Shutdown asml SNF 2008-02-10 18:26:12: Wafer stuck inside Message-ID: Wafer fell off the dipod while trying to transfer from pre-aligner to exposure chuck. Was able to retrieve wafer that was lying in the wafer stage. Cleaed the dipod, pre-aligner and robot surfaces. Cycled 10 wafers through system. Daily checks OK. Users wafer appears to not have Edge bead removal due to resist migration to the back of the wafer surface. There also appears to be contamination further in from edge that was most likely picked up at a dirty hotplate. PLEASE!!- Inspect the backs of your wafers and take nessesary action to ensure cleanliness. From chughes at snf.stanford.edu Mon Feb 18 10:27:41 2008 From: chughes at snf.stanford.edu (chughes at snf.stanford.edu) Date: Mon, 18 Feb 2008 10:27:41 -0800 Subject: Comment asml SNF 2008-02-18 10:27:40: Logfile full. Message-ID: The logfile appears to be full. From grahamab at snf.stanford.edu Wed Feb 20 16:34:55 2008 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Wed, 20 Feb 2008 16:34:55 -0800 Subject: Shutdown asml SNF 2008-02-20 16:34:54: wafer stuck; wafer stage won't initialize Message-ID: Wafer is on robot arm and never went into p-chuck, but "remove wafers" brings up a screen showing no wafers to move. Tried fast startup and full startup both without any change. Wafer stage fails to initialize successfully. From bindermann at snf.stanford.edu Thu Feb 21 08:20:43 2008 From: bindermann at snf.stanford.edu (bindermann at snf.stanford.edu) Date: Thu, 21 Feb 2008 08:20:43 -0800 Subject: Comment asml SNF 2008-02-21 08:20:41: asml Message-ID: The wafer was removed and the system was re-intialized. system up From gsosa at snf.stanford.edu Thu Feb 21 08:24:41 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 21 Feb 2008 08:24:41 -0800 Subject: Shutdown asml SNF 2008-02-20 16:34:54: wafer stuck; wafer stage won't initialize Message-ID: Removed stuck wafer on robot. Cleaned robot arm. Rebooted the system. From gsosa at snf.stanford.edu Mon Feb 25 08:30:57 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 25 Feb 2008 08:30:57 -0800 Subject: Shutdown asml SNF 2008-02-25 08:30:56: Monthly PM Due Message-ID: Scheduled monthly PM From gsosa at snf.stanford.edu Mon Feb 25 17:01:36 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 25 Feb 2008 17:01:36 -0800 Subject: Shutdown asml SNF 2008-02-25 08:30:56: Monthly PM Due Message-ID: Monthly PM completed. All critical surfaces cleaned. Focus reference state redifined. System ready to use. From chen0622 at snf.stanford.edu Wed Feb 27 16:46:26 2008 From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu) Date: Wed, 27 Feb 2008 16:46:26 -0800 Subject: Shutdown asml SNF 2008-02-27 16:46:25: a wafer lost in p-chuck Message-ID: From gsosa at snf.stanford.edu Thu Feb 28 08:22:06 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 28 Feb 2008 08:22:06 -0800 Subject: Shutdown asml SNF 2008-02-27 16:46:25: a wafer lost in p-chuck Message-ID: Removed users wafer from the P-chuck. Cleaned the P-chuck and robot arm. tested transfer with 8 dummy wafers. all OK. Users quartz wafer tested on UTS granite. Wafer did not float. Suspect bowed or warped wafer. Did daily checks. All OK. From mahnaz at snf.stanford.edu Fri Feb 29 16:32:57 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 29 Feb 2008 16:32:57 -0800 Subject: Problem asml SNF 2008-02-29 16:32:57: wafer stuck on the pchuck Message-ID: Gary is already working on it. From gsosa at snf.stanford.edu Fri Feb 29 16:48:11 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 29 Feb 2008 16:48:11 -0800 Subject: Problem asml SNF 2008-02-29 16:32:57: wafer stuck on the pchuck Message-ID: Retrieved stranded wafers from pre-aligner and robot. Tested wafer handling with dummy wafers- All OK. Users wafers do not look unusual on the back. They were ground down so they may be more grainy than normal. They did not stick on the UTS granite like warped wafers but they did not float so well either. User advised to retry wafers on Monday when there is more support available.,