Problem asml SNF 2008-02-01 12:38:33: system error occured

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Feb 1 13:40:44 PST 2008


Robot did not pick up wafer from input cassette. Re-iitialized the system and recovered stranded wafers. Cleaned the robot arm. Inspected useres wafers- looked good. Restarted users lot. All wafers processed successfully. System Up




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