Shutdown asml SNF 2008-02-03 09:04:06: wafers stuck in the tool.

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Feb 4 09:14:02 PST 2008


Wafers recovered from stepper and P/A unit cleaned. Ran clean test wafer- OK. Ran useres wafes-Not OK.. Users wafers appear to be warpped( The wafer would not float on a flat granite stone. Daily checks done all OK.




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